FIB - Foused Ion Beam, FEI, Helios 600 dual beam
The Helios 600 is a dual beam instrument combining scanning electron beam (SEM) and Focused Ion Beam (FIB) techchnologies as well as gas chemistries, different detectors and manipulators. Various applications with nano to micro scale resolution can be performed using the FIB for paternning, milling, cross section, materials deposition, High Resolution SEM imaging, SEM imaging, EDAX and even micro probing.
Specifications:
- High resolution SEM imaging ~ 0.8nm
- FIB writing resolution down to ~10nm
- Secondary and back scattered electrons detectors
- Deposition of conductive patch (Pt, Wt) and dielectric (SiO2)
- Etching using XeF2 and MgSO4-7H2O
- Creating TEM lamella
- Cross section
- Electrical measurements using micro probing
- Compositional analysis by EDAX- mapping and line scanning
- STEM imaging with resolution ~ 0.8nm
FIB writing
TEM Lamella
For more information please contact Dr. Yafit Fleger
Read more about Helios 600
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