@import url(/css/editorwyswyg9.css);
Atomic Layer Deposition, Cambridge, Fiji F200
Specification:
- 4 precursors lines with heated sources
- 4 gas inlets
- Turbo pump with APC mechanism for high aspect ratio samples
- Load lock chamber
- 8” sample holder
For more information please contact Dr. Yosi Abulafia
More on ALD, Fiji F200
Book your order for ALD work