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Pulse Laser Deposition, Neocera, Pioneer 180 CCS
Specification:
248nm KrF2 excimer laser
Up to 400 mJ pulse energy
4'' sample holder, heatable up to 850 C
Deposition from up to 6 targets
Deposition of homogeneous thickness
Deposition of compositional gradients
For more information please contact Dr. Sven Rühle
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